Micro Dot Patterning on the Light Guide Panel Using Powder Blasting.

This study is to develop a micromachining technology for a light guidepanel(LGP) mold, whereby micro dot patterns are formed on a LGP surface by a singleinjection process instead of existing screen printing processes. The micro powder blastingtechnique is applied to form micro dot patterns on the LGP mold surface. The optimalconditions for masking, laminating, exposure, and developing processes to form the microdot patterns are first experimentally investigated.

Micro Fluidic Channel Machining on Fused Silica Glass Using Powder Blasting.

In this study, micro fluid channels are machined on fused silica glass via powder blasting, a mechanical etching process, and the machining characteristics of the channels are experimentally evaluated. In the process, material removal is performed by the collision of micro abrasives injected by highly compressed air on to the target surface. This approach can be characterized as an integration of brittle mode machining based on micro crack propagation.

Experimental Study on the Effects of Alumina Abrasive Particle Behavior in MR Polishing for MEMS Applications.

Recently, the magnetorheological (MR) polishing process has been examined asa new ultra-precision polishing technology for micro parts in MEMS applications. In theMR polishing process, the magnetic force plays a dominant role. This method uses MRfluids which contains micro abrasives as a polishing media.

Application of Design of Experiment Method for Thrust Force Minimization in Step-feed Micro Drilling.

Micro drilled holes are utilized in many of today's fabrication processes.Precision production processes in industries are trending toward the use of smaller holeswith higher aspect ratios, and higher speed operation for micro deep hole drilling. However,undesirable characteristics related to micro drilling such as small signal-to-noise ratios,wandering drill motion, high aspect ratio, and excessive cutting forces can be observedwhen cutting depth increases.

Magnetostrictive Micro Mirrors for an Optical Switch Matrix.

We have developed a wireless-controlled compact optical switch by siliconmicromachining techniques with DC magnetron sputtering. For the optical switchingoperation, micro mirror is designed as cantilever shape size of 5mm×800μm×50μm.TbDyFe film is sputter-deposited on the upper side of the mirror with the condition as: Argas pressure below 1.