Insight into the electronic, elastic, structural, thermal, and optical characteristics of potassium magnesium fluoride KMgF with isotropic external stress.

The demand for increasingly fine detail in optical lithography for semiconductors necessitates the use of lower-wavelength lithographic light. This drives the need for lenses in optical lithography steppers made of vacuum ultraviolet-transparent (VUV-transparent) materials. In this work, the density functional theory (DFT) study of potassium magnesium fluoride KMgF is presented.