Design of a novel tri-axis ZnO nanowires based piezoelectric accelerometer.

Micro-Electromechanical Systems (MEMS) are pivotal in modern technology, serving as components like accelerometers, gyroscopes, and pressure sensors in various applications. MEMS accelerometers are key components used for measuring motion and vibrations in a wide range of systems. This paper presents the proposed design of a ZnO nanowires-based piezoelectric accelerometer.