A disturbance suppression micro-Newton force sensor based on shadow method.

The precision of micro-force measurement depends on the force sensor sensitivity and the environmental disturbance magnitude. However, micro-force sensors generally have the poor anti-disturbance ability. Inspired by the shadow formed by water striders walking on water surface under sunlight, a viscoelastic-polymer micro-force (VPMF) sensor based on the shadow method was proposed, which could suppress disturbances effectively due to the high damping ratio of 0.