High Q GaN/SiC-Based SAW Resonators for Humidity Sensor Applications.

This paper presents the simulation and experimental results for high-frequency surface acoustic wave (SAW) sensors for humidity detection. The SAW structures with a wavelength of 680 nm are fabricated on GaN/SiC and presented two resonance frequencies: ~6.66 GHz for the Rayleigh propagation mode and ~8 GHz for the Sezawa mode.

Interaction of Acoustic Waves With Spin Waves Using a GHz Operating GaN/Si SAW Device With a Ni/NiFeSi Layer Between Its IDTs.

A two-port surface acoustic wave (SAW) device was developed to be used for the control and excitation via spin waves (SWs). The structure was manufactured using advanced nanolithography techniques, on GaN/Si, enabling fundamental Rayleigh interdigitated transducer (IDT) resonances in the GHz frequency range. The ferromagnetic resonance (FMR) of the magnetostrictive Ni/NiFeSi layer placed between the IDTs of the SAW device can be tuned to the SAW resonance frequency by magnetic fields.