An UV cleaning technique has been used for the removal of carbon contamination from grating surface, using oxygen free-radicals generated by the absorption of UV radiation (172 nm) in atmospheric oxygen. The extent of restoration of absolute diffraction efficiency (ADE) and grating blaze angle of a carbon-contaminated variable line-spaced concave grating (average line spacing of 1200 lines/mm, blaze angle 3.2 deg, and blaze wavelength 10 nm) has been studied over a 5-70 nm wavelength range.
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