SnO2/Pt thin film laser ablated gas sensor array.

A gas sensor array was developed in a 10 × 10 mm(2) space using Screen Printing and Pulse Laser Ablation Deposition (PLAD) techniques. Heater, electrode, and an insulator interlayer were printed using the screen printing method on an alumina substrate, while tin oxide and platinum films, as sensing and catalyst layers, were deposited on the electrode at room temperature using the PLAD method, respectively. To ablate SnO(2) and Pt targets, depositions were achieved by using a 1,064 nm Nd-YAG laser, with a power of 0.