Modulation measuring profilometry with auto-synchronous phase shifting and vertical scanning.

To determine the shape of a complex object with vertical measurement mode and higher accuracy, a novel modulation measuring profilometry realizing auto-synchronous phase shifting and vertical scanning is proposed. Coaxial optical system for projection and observation instead of triangulation system is adopted to avoid shadow and occlusion. In the projecting system, sinusoidal grating is perpendicular to optical axis.