Parametric Characteristics and Bifurcation Analysis of Multi-Degree-of-Freedom Micro Gyroscope with Drive Stiffness Nonlinearity.

The dynamic equations of a four-degree-of-freedom micro gyroscope system were developed considering the nonlinearity of driving stiffness, the primary resonance, and the 1:1 internal resonance. Then, the perturbation analysis was carried out using the method of multiple scales. The influence of stiffness nonlinearity and system parameters on micro-gyro dynamic characteristics, output sensitivity, detection bandwidth, and working stability were discussed based on the analytic and numerical solutions of the dynamic equations.