Reflecting properties of narrowband Si/Al/Sc multilayer mirrors at 58.4 nm.

This study considers the reflective characteristics of three-component Si/Al/Sc multilayer mirrors with a protective cap layer as candidates for telescopes for observation of the solar corona in the He I (=58.4) spectral line. At 58.

Optical constants of sputtered beryllium thin films determined from photoabsorption measurements in the spectral range 20.4-250 eV.

In this work, the refractive index of beryllium in the photon energy range 20.4-250 eV was experimentally determined. The initial data include measurements of the transmittance of two free-standing Be films with thicknesses of 70 nm and 152 nm, as well as reflectometric measurements of similar films on a substrate.

Stable high-reflection Be/Mg multilayer mirrors for solar astronomy at 30.4 nm.

The He-II (λ=30.4  nm) emission line is one of the spectral channels chosen to study solar corona. This Letter reports on investigations of novel beryllium (Be)/magnesium multilayer coatings which, when incorporated beneath a protective bilayer of aluminium and Be, ensure particularly high-reflection coefficients of up to 56%, a spectral width of Δλ=1.

Beryllium-Based Multilayer Mirrors and Filters for the Extreme Ultraviolet Range.

This paper presents the first results of systematic studies of beryllium as a material for multilayer mirrors (MLM) and transmission filters (TF) for the EUV spectral range. The objective for the study is the need for the increase in reflectivity and spectral resolution of MLMs for studying the Sun's corona. We investigated Mo/Be (working wavelength is 13.

High-reflection Mo/Be/Si multilayers for EUV lithography.

The effect of Be layers on the reflection coefficients of Mo/Be/Si multilayer mirrors in the extreme ultraviolet (EUV) region is reported. Samples were studied using laboratory and synchrotron based reflectometry, and high-resolution transmission electron microscopy. The samples under study have reflection coefficients above 71% at 13.