Publications by authors named "Michel Lequime"

Following on from previous studies on motionless scatterometers based on the use of white light, we propose a new, to the best of our knowledge, experiment of white-light scattering that should overtake the previous ones in most situations. The setup is very simple as it requires only a broadband illumination source and a spectrometer to analyze light scattering at a unique direction. After introducing the principle of the instrument, roughness spectra are extracted for different samples, and the consistency of results is validated at the intersection of bandwidths.

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The measurement of very low reflection coefficients of anti-reflective coated interfaces has become a key issue for the realization of precision instruments such as the giant interferometers used for the detection of gravitational waves. We propose in this paper a method, based on low coherence interferometry and balanced detection, which not only allows to obtain the spectral dependence of this reflection coefficient in amplitude and phase, with a sensitivity of the order of 0.1 ppm and a spectral resolution of 0.

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We apply reverse engineering techniques (RET) to analyze the dehydration process of a sunflower leaf with terahertz time-domain spectroscopy. The multilayer structure of the leaf is extracted with accuracy during the entire process. Time variations of thickness and the complex index are emphasized for all leaf layers (2 cuticules, 2 epiderms, and 2 mesophylls).

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Capitalizing on a previous theoretical paper, we propose a novel approach, to our knowledge, that is different from the usual scattering measurements, one that is free of any mechanical movement or scanning. Scattering is measured along a single direction. Wide-band illumination with a properly chosen wavelength spectrum makes the signal proportional to the sample roughness, or to the higher-order roughness moments.

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We present an analytical method for the optimization of luminescent micro-cavities to create a substrate that is extremely sensitive to contamination. Giant optical enhancement can thus be controlled arbitrarily and simultaneously at various frequencies within the substrate's evanescent field with the aim of obtaining ultra-sensitive optical sensors. This process provides an alternative to sensors based on illumination in free space.

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We numerically demonstrate the capability of a single metasurface to simultaneously separate and focus spectral features in accordance with the specifications of a pushbroom hyperspectral imager. This is achieved through the dispersion engineering of a library of two-level TiO nano-elements. Sommerfeld integrals are used to confirm our numerical simulations provided by our solver based on Fourier modal method.

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Despite limiting the performance of multilayer optical thin-films, light scattering properties are not as yet controllable by current design methods. These methods usually consider only specular properties: transmittance and reflectance. Among other techniques, design of thin-film components assisted by deep neural networks have seen growing interest over the last few years.

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Despite numerous works devoted to light scattering in multilayer optics, trapped scattering has not been considered until now. This consists in a roughness-coupling process at each interface of the multilayer, giving rise to electromagnetic modes traveling within the stack. Such a modal scattering component is today necessary for completing the energy balance within high-precision optics including mirrors for gyro-lasers and detection of gravitational waves, where every ppm (part per million) must be accounted for.

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We present a new method for the in situ measurement of the amplitude and phase of the reflection coefficient of a plane substrate installed in a mechanical holder rotating at high speed (120 turns per minute) during the deposition of optical thin films. Our method is based on digital holography and uses a self-referenced scheme to cancel the effects of the severe constraints generated by the vibrational and thermal environment of the deposition machine.

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We present a new version of a light scattering measurement setup, using a high-power supercontinuum laser source, two volume hologram filters, and two low-noise scientific grade cameras. This configuration enables spectral and angle resolved characterization of the light scattered by complex thin-film filters from 400 to 1650 nm. Measurements carried out on specific filters illustrate the performances of the setup.

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In this paper, we provide a detailed description of the main features of the upgraded version of a spectrophotometric apparatus developed by our team since 2014 [ Opt. Express23, 26863 (2015)]), and whose improved performance allows the characterization over the visible and near infrared part of the spectrum of the transmittance of complex interference filters with high spectral resolution (approximately one tenth of a nanometer) and an extremely wide dynamic range (thirteen decades).

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An exact formulation for the propagation of a monochromatic wave packet impinging on a transparent, homogeneous, isotropic, and parallel slab at oblique incidence is given. Approximate formulas are derived for low divergence light beams. These formulas show the presence of anomalous refraction phenomena at any slab thickness, including negative refraction and flat lensing effects, induced by reflection at the rear face.

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This paper extends a method previously applied to the determination of the optical constants of a high-index thin film to a dielectric bilayer. This method is based on the time recording of the spectral transmittance of the stack during its deposition with the help of an in situ broadband monitoring system.

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We present a white light scatterometer operating at a unique scattering direction. Mechanical motions and wavelength scans are removed. The technique provides an immediate flexible characterization of roughness with no loss of resolution.

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This paper describes a new method based on the use of a broadband monitoring system to determine the spectral dependence of the optical constants of a layer without using a dispersion model.

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Complex optical coatings may present highly disturbed scattering patterns, both spectrally and angularly. We show in this paper how the development of an accurate dedicated metrology allowed the optimization of numerical models. Our prediction is compared to our measurement.

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We present the improved structure and operating principle of a spectrophotometric mean that allows us for the recording of the transmittance of a thin-film filter over an ultra-wide range of optical densities (from 0 to 11) between 400 and 1000 nm. The operation of this apparatus is based on the combined use of a high power supercontinuum laser source, a tunable volume hologram filter, a standard monochromator and a scientific grade CCD camera. The experimentally recorded noise floor is in good accordance with the optical density values given by the theoretical approach.

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Analytic and passivity properties of reflection and transmission coefficients of thin-film multilayered stacks are investigated. Using a rigorous formalism based on the inverse Helmholtz operator, properties associated with the causality principle and passivity are established when both the temporal frequency and spatial wave vector are continued in the complex plane. This result extends the range of situations where the Kramers-Kronig relations can be used to deduce the phase from the intensity.

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A new transmittance measurement setup, based on the use of a tunable laser source and a low-noise scientific-grade CCD camera operating in perfect integration mode, is proposed to achieve the spectrally resolved characterization of thin-film filters with optical densities from 0 to 12 in a wavelength range between 400 and 1000 nm. The first experimental results obtained on dedicated components demonstrate the efficiency of this new measurement scheme.

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The use of negative-index materials is highly efficient for tailoring the spectral dispersion properties of a quarter-wavelength Bragg mirror and for obtaining resonant behavior of a multilayer Fabry-Perot cavity over a very large spectral range. An optimization method is proposed and validated on some first promising devices.

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A far-field setup based on the fast and simultaneous recording of 1 million intensity angle-resolved-light-scattering patterns allows both to reconstruct surface topography and to cancel local defects in this topography. A spectral analysis is performed on measured data and allows to extract roughness and slopes mapping of a surface taking into account the spectral bandpass.

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In the present paper we determine the optical constants and thicknesses of multilayer thin film stacks, in the visible and near infrared ranges. These parameters are derived from the transmittance and reflectance spectra measured by a spectrophotometer, for several angles of incidence. Several examples are studied, from a simple single layer structure up to a 22-layer dielectric filter.

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A new class of Fabry-Perot filters produced by a multilayer dielectric mirror deposited on top of a reflecting volume Bragg grating is described. The first fabricated prototype for the 852 nm region demonstrates a 30 pm bandwidth, 90+% transmission at resonance, and a good agreement with theoretical simulation.

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A CCD angular resolved scattering setup is presented. This new high sensitivity instrument allows both spatial and angular resolved measurement of scattered field intensity and polarimetric features. Applications to the comprehensive characterization of optical coatings are given.

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We propose a method for manufacturing linear variable interference filters for two-dimensional (2D) array detectors, based on the use of correcting masks combining both rotation and translation movements of the masks and substrates. The major advantage of this method is its capability to produce several identical filters in a single run. 20 mm x 20 mm samples were manufactured with a wavelength ratio almost equal to 2 along the thickness gradient direction.

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