Atomic force microscopy with integrated on-chip interferometric readout.

The most common readout technique used in atomic force microscopy (AFM) is based on optical beam deflection (OBD), which relies on monitoring deflection of the cantilever probe by measuring the position of the laser beam reflected from the free end of the AFM cantilever. Although systems using the OBD readout can achieve subnanometre displacement resolution and video rate imaging speeds, its main limitation is size, which is difficult to minimise, thus limiting multiprobe imaging capability. Currently, system miniaturisation has been accommodated by adopting on-chip electrical readout solutions, often at the expense of measurement sensitivity.

Multimodal atomic force microscopy with optimized higher eigenmode sensitivity using on-chip piezoelectric actuation and sensing.

Atomic force microscope (AFM) cantilevers with integrated actuation and sensing provide several distinct advantages over conventional cantilever instrumentation. These include clean frequency responses, the possibility of down-scaling and parallelization to cantilever arrays as well as the absence of optical interference. While cantilever microfabrication technology has continuously advanced over the years, the overall design has remained largely unchanged; a passive rectangular shaped cantilever design has been adopted as the industry wide standard.