Field-emission electron gun for a MEMS electron microscope.

This article presents a field-emission electron gun intended for use in a MEMS (microelectromechanical system) electron microscope. Its fabrication process follows the technology of a miniature device under development built from silicon electrodes and glass spacers. The electron gun contains a silicon cathode with a single very sharp protrusion and a bundle of disordered CNTs deposited on its end (called a sharp silicon/CNT cathode).

Detection of secondary and backscattered electrons for 3D imaging with multi-detector method in VP/ESEM.

The paper considers some major problems of adapting the multi-detector method for three-dimensional (3D) imaging of wet bio-medical samples in Variable Pressure/Environmental Scanning Electron Microscope (VP/ESEM). The described method pertains to "single-view techniques", which to create the 3D surface model utilise a sequence of 2D SEM images captured from a single view point (along the electron beam axis) but illuminated from four directions. The basis of the method and requirements resulting from them are given for the detector systems of secondary (SE) and backscattered electrons (BSE), as well as designs of the systems which could work in variable conditions.