Reflective binary amplitude grating for soft x-ray shearing and Hartmann wavefront sensing.

We demonstrate a reflective wavefront sensor grating suitable for the characterization of high-quality x-ray beamlines and optical systems with high power densities. Operating at glancing incidence angles, the optical element is deeply etched with a two-level pattern of shearing interferometry gratings and Hartmann wavefront sensor grids. Transverse features block unwanted light, enabling binary amplitude in reflection with high pattern contrast.

Operation of a MOEMS Deformable Mirror in Cryo: Challenges and Results.

Micro-opto-electro-mechanical systems (MOEMS) Deformable Mirrors (DM) are key components for next generation optical instruments implementing innovative adaptive optics systems, both in existing telescopes and in the future ELTs. Characterizing these components well is critical for next generation instruments. This is done by interferometry, including surface quality measurement in static and dynamical modes, at ambient and in vacuum/cryo.

MEMS segmented-based adaptive optics scanning laser ophthalmoscope.

The performance of a MEMS (micro-electro-mechanical-system) segmented deformable mirror was evaluated in an adaptive optics (AO) scanning laser ophthalmoscope. The tested AO mirror (Iris AO, Inc, Berkeley, CA) is composed of 37 hexagonal segments that allow piston/tip/tilt motion up to 5 μm stroke and ±5 mrad angle over a 3.5 mm optical aperture.