Highly precise micro-retroreflector array fabricated by the LIGA process and its application as tapped delay line filter.

We report on the fabrication of a one-dimensional micro-retroreflector array with a pitch of 100 μm. The array was fabricated by x-ray lithography and the lithographie, galvanik und abformung (LIGA) process in a 1 mm thick poly(methyl methacrylate) (PMMA) layer and subsequently covered with Au. The area of the array is 1 mm×10 mm.