Low-thermal-budget electrically active thick polysilicon for CMOS-First MEMS-last integration.

Low-thermal-budget, electrically active, and thick polysilicon films are necessary for building a microelectromechanical system (MEMS) on top of a complementary metal oxide semiconductor (CMOS). However, the formation of these polysilicon films is a challenge in this field. Herein, for the first time, the development of in situ phosphorus-doped silicon films deposited under ultrahigh-vacuum conditions (~10 Torr) using electron-beam evaporation (UHVEE) is reported.

Enhancing Optical Correlation Decision Performance for Face Recognition by Using a Nonparametric Kernel Smoothing Classification.

Optical correlation has a rich history in image recognition applications from a database. In practice, it is simple to implement optically using two lenses or numerically using two Fourier transforms. Even if correlation is a reliable method for image recognition, it may jeopardize decision making according to the location, height, and shape of the correlation peak within the correlation plane.

Multimodal acquisition of articulatory data: Geometrical and temporal registration.

Acquisition of dynamic articulatory data is of major importance for studying speech production. It turns out that one technique alone often is not enough to get a correct coverage of the whole vocal tract at a sufficient sampling rate. Ultrasound (US) imaging has been proposed as a good acquisition technique for the tongue surface because it offers a good temporal sampling, does not alter speech production, is cheap, and is widely available.