Two-dimensional pattern formation using graphoepitaxy of PS-b-PMMA block copolymers for advanced FinFET device and circuit fabrication.

Directed self-assembly (DSA) of lamellar phase block-co-polymers (BCPs) can be used to form nanoscale line-space patterns. However, exploiting the potential of this process for circuit relevant patterning continues to be a major challenge. In this work, we propose a way to impart two-dimensional pattern information in graphoepitaxy-based lamellar phase DSA processes by utilizing the interactions of the BCP with the template pattern.

Synthetic nanoscale elements for delivery of materials into viable cells.

Arrays of vertically aligned carbon nanofibers (VACNFs) provide structures that are well suited for the direct integration and manipulation of molecular-scale phenomena within intact, live cells. VACNFs are fabricated via a combination of microfabrication techniques and catalytic plasma-enhanced chemical vapor deposition. In this chapter, we discuss the synthesis of VACNFs and detail the methods for introducing these arrays into the intracellular domain of mammalian cells for the purpose of delivering large macromolecules, specifically plasmid DNA, on a massively parallel basis.