This study explores the low-temperature synthesis of graphene using plasma-enhanced chemical vapor deposition (PECVD), emphasizing the optimization of process parameters to achieve controlled growth of pristine and hydrogenated graphene. Graphene films were synthesized at temperatures ranging from 700 °C to as low as 400 °C by varying methane (25-100 sccm) and hydrogen (25-100 sccm) gas flow rates under 10-20 mBar pressures. Raman spectroscopy revealed structural transitions: pristine graphene grown at 700 °C exhibited strong 2D peaks with an I(2D)/I(G) ratio > 2, while hydrogenated graphene synthesized at 500 °C showed increased defect density with an I(D)/I(G) ratio of ~1.
View Article and Find Full Text PDFIn the present research, hexagonal boron nitride (h-BN) films were deposited by reactive high-power impulse magnetron sputtering (HiPIMS) of the pure boron target. Nitrogen was used as both a sputtering gas and a reactive gas. It was shown that, using only nitrogen gas, hexagonal-boron-phase thin films were synthesized successfully.
View Article and Find Full Text PDFThe high surface area and transfer-less growth of graphene on dielectric materials is still a challenge in the production of novel sensing devices. We demonstrate a novel approach to graphene synthesis on a C-plane sapphire substrate, involving the microwave plasma-enhanced chemical vapor deposition (MW-PECVD) technique. The decomposition of methane, which is used as a precursor gas, is achieved without the need for remote plasma.
View Article and Find Full Text PDFHerein we investigated hydrophilic surface modification of SiO containing amorphous hydrogenated carbon nanocomposite films (DLC:SiO) via the use of atmospheric oxygen plasma treatment. The modified films exhibited effective hydrophilic properties with complete surface wetting. More detailed water droplet contact angle (CA) measurements revealed that oxygen plasma treated DLC:SiO films maintained good wetting properties with CA of up to 28 ± 1° after 20 days of aging in ambient air at room temperature.
View Article and Find Full Text PDFIn the present research, graphene was synthesized directly on a Si(100) substrate combining direct microwave plasma-enhanced chemical vapor deposition and protective enclosure. The graphene flake orientation was controlled using suitable synthesis conditions. We revealed that high processing temperatures and plasma powers promote vertical graphene growth.
View Article and Find Full Text PDFGraphene was synthesized directly on Si(100) substrates by microwave plasma-enhanced chemical vapor deposition (MW-PECVD). The effects of the graphene structure on the electrical and photovoltaic properties of graphene/n-Si(100) were studied. The samples were investigated using Raman spectroscopy, atomic force microscopy, and by measuring current-voltage (I-V) graphs.
View Article and Find Full Text PDFIn this study, graphene was synthesized on the Si(100) substrates via the use of direct microwave plasma-enhanced chemical vapor deposition (PECVD). Protective enclosures were applied to prevent excessive plasma etching of the growing graphene. The properties of synthesized graphene were investigated using Raman scattering spectroscopy and atomic force microscopy.
View Article and Find Full Text PDFIn the present research diamond-like carbon (DLC) films containing 4-29 at.% of silicon were deposited by reactive magnetron sputtering of carbon target. Study by X-ray photoelectron spectroscopy revealed the presence of Si-C bonds in the films.
View Article and Find Full Text PDFIn the present research, hydrogen-free diamond like carbon films with embedded copper nanoparticles (DLC:Cu) were grown by simultaneous DC magnetron sputtering of the graphite and copper targets. X-ray photoelectron spectroscopy was used to define the composition of the samples. Atomic force microscopy studies of diamond, like carbon films containing different amount of copper, revealed wide range of the surface morphologies as well as sizes and shapes of the embedded copper nanoclusters.
View Article and Find Full Text PDFPiezoresistive properties of hydrogenated diamond-like carbon (DLC) and DLC-based nickel nanocomposite (DLC:Ni) films were studied in the range of low concentration of nickel nanoparticles. The films were deposited by reactive high power pulsed magnetron sputtering (HIPIMS) of Ni target, and some samples were deposited by direct current (dc) reactive magnetron sputtering for comparison purposes. Raman scattering spectroscopy, energy-dispersive X-ray spectrometry (EDS), and X-ray photoelectron spectroscopy (XPS) were used to study the structure and chemical composition of the films.
View Article and Find Full Text PDFIn this work we present an overview on structure formation, optical and electrical properties of diamond like carbon (DLC) based metal nanocomposites deposited by reactive magnetron sputtering and treated by plasma and laser ablation methods. The influence of deposition mode and other technological conditions on the properties of the nanosized filler, matrix components and composition were studied systematically in relation to the final properties of the nanocomposites. Applications of the nanocomposites in the development of novel biosensors combining resonance response of wave guiding structures in DLC based nanocomposites as well as plasmonic effects are also presented.
View Article and Find Full Text PDFUltrafast relaxation dynamics of diamond-like carbon (DLC) films with embedded Ag nanoparticles (DLC:Ag) and photovoltaic properties of heterojunctions consisting of DLC:Ag and crystalline silicon (DLC:Ag/Si) were investigated by means of transient absorption (TAS) spectroscopy and photovoltaic measurements. The heterojunctions using both p type and n type silicon were studied. It was found that TAS spectra of DLC:Ag films were dependent on the used excitation wavelength.
View Article and Find Full Text PDFWe present Raman studies of graphene films grown on copper foil by atmospheric pressure CVD with n-decane as a precursor, a mixture of nitrogen and hydrogen as the carrier gas, under different hydrogen flow rates. A novel approach for the processing of the Raman spectroscopy data was employed. It was found that in particular cases, the various parameters of the Raman spectra can be assigned to fractions of the films with different thicknesses.
View Article and Find Full Text PDFIn the present study, diamond-like carbon films with embedded Ag nanoparticles (DLC:Ag) were deposited by reactive magnetron sputtering. Structure of the films was investigated by Raman scattering spectroscopy. Atomic force microscopy was used to define thickness of DLC:Ag films as well as to study the surface morphology and size distribution of Ag nanoparticles.
View Article and Find Full Text PDFDiamond-like carbon nanocomposite films with embedded silver nanoparticles are considered experimentally (spectroellipsometric characterization) and theoretically (modeling of optical properties). Metallic nanocomposite films were synthesized by reactive magnetron sputtering and were studied by transmission electron microscope (TEM) and atomic force microscope (AFM). The optical constants of the films were determined from spectroscopic ellipsometry measurements and were modeled using the Maxwell-Garnett approximations.
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