All-Solid-State Thin Film μ-Batteries for Microelectronics.

Continuous advances in microelectronics and micro/nanoelectromechanical systems enable the use of microsized energy storage devices, namely solid-state thin-film μ-batteries. Different from the current button batteries, the μ-battery can directly be integrated on microchips forming a very compact "system on chip" since no liquid electrolyte is used in the μ-battery. The all-solid-state battery (ASSB) that uses solid-state electrolyte has become a research trend because of its high safety and increased capacity.