Electrical and Optical Characterization of SAW Sensors Coated with Parylene C and Their Analysis Using the Coupling-of-Modes (COM) Theory.

In this paper, we present how complementary characterization techniques, such as electrical measurements with a vector network analyzer (VNA), optical measurements with a laser Doppler vibrometer (LDV), and numerical simulations with the finite element method, coupled with spectral domain analysis (FEMSDA), allow us to independently access different properties of a SAW device and fully characterize its operation using the coupling-of-modes theory (COM). A set of chemical SAW sensors coated with parylene C layers of different thicknesses (1, 1.5, and 2 µm) and an uncoated sensor were used as test samples.

Real Time Cascade Impactor Based On Surface Acoustic Wave Delay Lines for PM10 and PM2.5 Mass Concentration Measurement.

In this research, Surface Acoustic Wave (SAW) sensors are combined with a cascade impactor to perform real time PM10 and PM2.5 mass concentration measurements. The SAW sensors consist of 125 MHz delay lines based on Love waves propagating on an AT-cut quartz substrate.