We demonstrate the enhancement of output power from a ZnO nanorod (NR)-based piezoelectric nanogenerator by using Si microhole (Si-μH) arrays. The depth-controlled Si-μH arrays were fabricated by using the deep reactive ion etching method. The ZnO NRs were grown along the Si-μH surface, in holes deeper than 20 μm.
View Article and Find Full Text PDFEnhanced output power from a ZnO nanorod (NR)-based piezoelectric nanogenerator (PNG) is demonstrated by forming a heterojunction with Si micropillar (MP) array. The length of the SiMP array, which was fabricated by electrochemical etching, was increased systematically from 5 to 20 μm by controlling the etching time. Our structural and optical investigations showed that the ZnO NRs were grown hierarchically on the SiMPs, and their crystalline quality was similar regardless of the length of the underlying SiMPs.
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