A versatile chemical vapor synthesis reactor for in situ x-ray scattering and spectroscopy.

We describe a versatile reactor system for chemical vapor synthesis of nanoparticles, which enables in situ investigations of high temperature gas phase particle formation and transformation processes by x-ray scattering and x-ray absorption spectroscopy. The system employs an inductively heated hot wall reactor as the energy source to start nanoparticle formation from a mixture of precursor vapor and oxygen. By use of a modular set of susceptor segments, it is especially possible to change solely the residence time of the gas mixture while keeping all other process parameters (temperature, gas flow, pressure) constant.