Electrical Conduction Properties of Hydrogenated Amorphous Carbon Films with Different Structures.

Hydrogenated amorphous carbon (-C:H) films have optical and electrical properties that vary widely depending on deposition conditions; however, the electrical conduction mechanism, which is dependent on the film structure, has not yet been fully revealed. To understand the relationship between the film structure and electrical conduction mechanism, three types of C:H films were prepared and their film structures and electrical properties were evaluated. The /( + ) ratios were measured by a near-edge X-ray absorption fine structure technique.