Structural and Mechanical Properties of a-BCN Films Prepared by an Arc-Sputtering Hybrid Process.

Amorphous boron carbon nitride (a-BCN) films exhibit excellent properties such as high hardness and high wear resistance. However, the correlation between the film structure and its mechanical properties is not fully understood. In this study, a-BCN films were prepared by an arc-sputtering hybrid process under various coating conditions, and the correlations between the film's structure and mechanical properties were clarified.