Quantitative chemical analyses of NiAl based hardening precipitates (γ') in polycrystalline Ni based superalloys have been conducted using energy dispersive X-ray spectroscopy (EDX), coupled with a scanning transmission electron microscope (STEM). The aim of the current investigation is (1) to evaluate the accuracy of calibration (k factor determinations and absorption corrections using a combination of differential X-ray absorption (DXA) and convergent beam electron diffraction (CBED)) by comparing with thermodynamic calculations and (2) to demonstrate the importance of the EDX chemical analysis by taking advantage of its unique capabilities to analyse sub-micron scale chemistries within a mesoscopic field of view under STEM. Our experimental findings show good agreement with the mole fraction ratio of γ' to the disordered γ matrix predicted using the Lever rule on a thermodynamically stabilised unimodal superalloy, RR1000.
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