Microfabrication of piezoelectric MEMS based on thick LiNbOsingle-crystal films.

Microfabrication procedure of piezoelectric micro electro-mechanical systems based on 5m thick LiNbOfilms on SiO/Si substrate at wafer scale including deep dry etching of thick LiNbOfilms by implementing pulsed mode of Ar/SFgas was developed. In particular, two (YXlt)/128°/90°LiNbO-Si cantilevers with tip mass were fabricated and characterized in terms of resonance frequency (511 and 817 Hz), actuation and acceleration sensing capabilities. The quality factor of 89.

Acousto-electric measurements at 2.5 GHz on graphene transferred onto YX128°-LiNbO.

Surface acoustic wave delay lines with an operational frequency of 2.5 GHz have been designed to measure the acousto-electric transport of carriers in graphene transferred onto YX128°-LiNbOpiezoelectric substrate. The monolayer of graphene on LiNbOpresented sheet resistance in the range of 733-1230 Ω/□ and ohmic contact resistance with gold of 1880 to 5200 Ωm.

A Self-Powered and Battery-Free Vibrational Energy to Time Converter for Wireless Vibration Monitoring.

Wireless sensor nodes (WSNs) are the fundamental part of an Internet of Things (IoT) system for detecting and transmitting data to a master node for processing. Several research studies reveal that one of the disadvantages of conventional, battery-powered WSNs, however, is that they typically require periodic maintenance. This paper aims to contribute to existing research studies on this issue by exploring a new energy-autonomous and battery-free WSN concept for monitor vibrations.