Publications by authors named "Marcus Chaney"
Article Synopsis
- The study presents a method for measuring phase change using interferometry, effectively eliminating height variations by relying on backreflection from samples.
- The phase change measurement has an uncertainty of +/-3.8 degrees, primarily caused by the techniques used for background subtraction.
- Additionally, the research explores how phase changes can impact interferometric radius measurements, noting a worst-case error of 30 nm.
