Nano-imprint lithography of broad-band and wide-angle antireflective structures for high-power lasers.

We demonstrate efficient anti reflection coatings based on adiabatic index matching obtained via nano-imprint lithography. They exhibit high total transmission, achromaticity (99.5% < T < 99.

Back-propagation optimization and multi-valued artificial neural networks for highly vivid structural color filter metasurfaces.

We introduce a novel technique for designing color filter metasurfaces using a data-driven approach based on deep learning. Our innovative approach employs inverse design principles to identify highly efficient designs that outperform all the configurations in the dataset, which consists of 585 distinct geometries solely. By combining Multi-Valued Artificial Neural Networks and back-propagation optimization, we overcome the limitations of previous approaches, such as poor performance due to extrapolation and undesired local minima.

Engineering and detection of light scattering directionalities in dewetted nanoresonators through dark-field scanning microscopy.

Dewetted, SiGe nanoparticles have been successfully exploited for light management in the visible and near-infrared, although their scattering properties have been so far only qualitatively studied. Here, we demonstrate that the Mie resonances sustained by a SiGe-based nanoantenna under tilted illumination, can generate radiation patterns in different directions. We introduce a novel dark-field microscopy setup that exploits the movement of the nanoantenna under the objective lens to spectrally isolate Mie resonances contribution to the total scattering cross-section during the same measurement.

Structure induced laminar vortices control anomalous dispersion in porous media.

Natural porous systems, such as soil, membranes, and biological tissues comprise disordered structures characterized by dead-end pores connected to a network of percolating channels. The release and dispersion of particles, solutes, and microorganisms from such features is key for a broad range of environmental and medical applications including soil remediation, filtration and drug delivery. Yet, owing to the stagnant and opaque nature of these disordered systems, the role of microscopic structure and flow on the dispersion of particles and solutes remains poorly understood.

Enhanced Refractive Index Sensitivity through Combining a Sol-Gel Adsorbate with a TiO Nanoimprinted Metasurface for Gas Sensing.

We combine a gas-adsorbent microporous hybrid silica layer and a dense TiO Mie resonator array (metasurface), both obtained by sol-gel deposition and nanoimprint lithography, to form nanocomposite systems with high sensitivity for refractive index (RI) variations induced by gas adsorption. Using optical transduction based on direct specular reflection, we show spectral shifts of 4470 nm/RIU corresponding to 0.2 nm/ppm gas (air concentration) and reflection intensity changes of * = 17 (R/RIU) and 0.

Quasi-Guided Modes in Titanium Dioxide Arrays Fabricated via Soft Nanoimprint Lithography.

Reversible quasi-guided modes (QGMs) are observed in titanium dioxide (TiO) metasurface arrays fabricated via soft nanoimprint lithography. A TiO layer between the nanopillar array and the substrate can facilitate the propagation of QGMs. This layer is porous, allowing for the tuning of the layer properties by incorporating another material.

Scalable Disordered Hyperuniform Architectures Nanoimprint Lithography of Metal Oxides.

Fabrication and scaling of disordered hyperuniform materials remain hampered by the difficulties in controlling the spontaneous phenomena leading to this novel kind of exotic arrangement of objects. Here, we demonstrate a hybrid top-down/bottom-up approach based on sol-gel dip-coating and nanoimprint lithography for the faithful reproduction of disordered hyperuniform metasurfaces in metal oxides. Nano- to microstructures made of silica and titania can be directly printed over several cm on glass and on silicon substrates.

Polarization Anisotropies in Strain-Free, Asymmetric, and Symmetric Quantum Dots Grown by Droplet Epitaxy.

We provide an extensive and systematic investigation of exciton dynamics in droplet epitaxial quantum dots comparing the cases of (311)A, (001), and (111)A surfaces. Despite a similar s-shell exciton structure common to the three cases, the absence of a wetting layer for (311)A and (111)A samples leads to a larger carrier confinement compared to (001), where a wetting layer is present. This leads to a more pronounced dependence of the binding energies of s-shell excitons on the quantum dot size and to the strong anti-binding character of the positive-charged exciton for smaller quantum dots.

New Strategies for Engineering Tensile Strained Si Layers for Novel n-Type MOSFET.

We report a novel approach for engineering tensely strained Si layers on a relaxed silicon germanium on insulator (SGOI) film using a combination of condensation, annealing, and epitaxy in conditions specifically chosen from elastic simulations. The study shows the remarkable role of the SiO buried oxide layer (BOX) on the elastic behavior of the system. We show that tensely strained Si can be engineered by using alternatively rigidity (at low temperature) and viscoelasticity (at high temperature) of the SiO substrate.

Solid-State Dewetting Dynamics of Amorphous Ge Thin Films on Silicon Dioxide Substrates.

We report on the dewetting process, in a high vacuum environment, of amorphous Ge thin films on SiO/Si (001). A detailed insight of the dewetting is obtained by in situ reflection high-energy electron diffraction and ex situ scanning electron microscopy. These characterizations show that the amorphous Ge films dewet into Ge crystalline nano-islands with dynamics dominated by crystallization of the amorphous material into crystalline nano-seeds and material transport at Ge islands.

Hyperuniform Monocrystalline Structures by Spinodal Solid-State Dewetting.

Materials featuring anomalous suppression of density fluctuations over large length scales are emerging systems known as disordered hyperuniform. The underlying hidden order renders them appealing for several applications, such as light management and topologically protected electronic states. These applications require scalable fabrication, which is hard to achieve with available top-down approaches.

Engineering of the spin on dopant process on silicon on insulator substrate.

We report on a systematic analysis of phosphorus diffusion in silicon on insulator thin film via spin-on-dopant process (SOD). This method is used to provide an impurity source for semiconductor junction fabrication. The dopant is first spread into the substrate via SOD and then diffused by a rapid thermal annealing process.

Exciton Dynamics in Droplet Epitaxial Quantum Dots Grown on (311)A-Oriented Substrates.

Droplet epitaxy allows the efficient fabrication of a plethora of 3D, III-V-based nanostructures on different crystalline orientations. Quantum dots grown on a (311)A-oriented surface are obtained with record surface density, with or without a wetting layer. These are appealing features for quantum dot lasing, thanks to the large density of quantum emitters and a truly 3D lateral confinement.

Raman microscopy and infrared optical properties of SiGe Mie resonators formed on SiO via Ge condensation and solid state dewetting.

All-dielectric photonics is a rapidly developing field of optics and material science. The main interest at visible and near-infrared frequencies is light management using high-refractive-index Mie-resonant dielectric particles. Most work in this area of research focuses on exploiting Si-based particles.

Templated dewetting of single-crystal sub-millimeter-long nanowires and on-chip silicon circuits.

Large-scale, defect-free, micro- and nano-circuits with controlled inter-connections represent the nexus between electronic and photonic components. However, their fabrication over large scales often requires demanding procedures that are hardly scalable. Here we synthesize arrays of parallel ultra-long (up to 0.

Capillary-driven elastic attraction between quantum dots.

We present a novel self-assembly route to align SiGe quantum dots. By a combination of theoretical analyses and experimental investigation, we show that epitaxial SiGe quantum dots can cluster in ordered closely packed assemblies, revealing an attractive phenomenon. We compute nucleation energy barriers, accounting for elastic effects between quantum dots through both elastic energy and strain-dependent surface energy.

Method To Detect Ethanol Vapor in High Humidity by Direct Reflection on a Xerogel Coating.

A simple double thin-film coating-based device is proposed to quantify the ethanol content in humid air featuring a 10 ppm resolution and spanning a dynamic range from 0 to 1000 ppm. The transduction involves the measurement of the direct optical reflection intensity, changing upon refractive index variations induced by water and ethanol adsorption within the coatings. The first thin-film coating is a microporous methyl-functionalized, silica xerogel material more sensitive to alcohol, and the second one is a microporous pure silica xerogel material more sensitive to water.

New strategies for producing defect free SiGe strained nanolayers.

Strain engineering is seen as a cost-effective way to improve the properties of electronic devices. However, this technique is limited by the development of the Asarro Tiller Grinfeld growth instability and nucleation of dislocations. Two strain engineering processes have been developed, fabrication of stretchable nanomembranes by deposition of SiGe on a sacrificial compliant substrate and use of lateral stressors to strain SiGe on Silicon On Insulator.

Environment-controlled sol-gel soft-NIL processing for optimized titania, alumina, silica and yttria-zirconia imprinting at sub-micron dimensions.

Metal oxide (MO) surface nanopatterns can be prepared using Soft-Nano-Imprint-Lithography (soft-NIL) combined with sol-gel deposition processing. Even if sol-gel layers remain gel-like straight after deposition, their accurate replication from a mould remains difficult as a result of the fast evaporation-induced stiffening that prevents efficient mass transfer underneath the soft mould. The present work reports a detailed investigation of the role of the xerogel layer conditioning (temperature and relative humidity) prior to imprinting and its influence on the quality of the replication.

Complex dewetting scenarios of ultrathin silicon films for large-scale nanoarchitectures.

Dewetting is a ubiquitous phenomenon in nature; many different thin films of organic and inorganic substances (such as liquids, polymers, metals, and semiconductors) share this shape instability driven by surface tension and mass transport. Via templated solid-state dewetting, we frame complex nanoarchitectures of monocrystalline silicon on insulator with unprecedented precision and reproducibility over large scales. Phase-field simulations reveal the dominant role of surface diffusion as a driving force for dewetting and provide a predictive tool to further engineer this hybrid top-down/bottom-up self-assembly method.

Tailoring Strain and Morphology of Core-Shell SiGe Nanowires by Low-Temperature Ge Condensation.

Selective oxidation of the silicon element of silicon germanium (SiGe) alloys during thermal oxidation is a very important and technologically relevant mechanism used to fabricate a variety of microelectronic devices. We develop here a simple integrative approach involving vapor-liquid-solid (VLS) growth followed by selective oxidation steps to the construction of core-shell nanowires and higher-level ordered systems with scalable configurations. We examine the selective oxidation/condensation process under nonequilibrium conditions that gives rise to spontaneous formation of core-shell structures by germanium condensation.

Formation of Silicene Nanosheets on Graphite.

The extraordinary properties of graphene have spurred huge interest in the experimental realization of a two-dimensional honeycomb lattice of silicon, namely, silicene. However, its synthesis on supporting substrates remains a challenging issue. Recently, strong doubts against the possibility of synthesizing silicene on metallic substrates have been brought forward because of the non-negligible interaction between silicon and metal atoms.

Templated Solid-State Dewetting of Thin Silicon Films.

Thin film dewetting can be efficiently exploited for the implementation of functionalized surfaces over very large scales. Although the formation of sub-micrometer sized crystals via solid-state dewetting represents a viable method for the fabrication of quantum dots and optical meta-surfaces, there are several limitations related to the intrinsic features of dewetting in a crystalline medium. Disordered spatial organization, size, and shape fluctuations are relevant issues not properly addressed so far.

Fabrication of core-shell nanostructures via silicon on insulator dewetting and germanium condensation: towards a strain tuning method for SiGe-based heterostructures in a three-dimensional geometry.

We report on a novel method for the implementation of core-shell SiGe-based nanocrystals combining silicon on insulator dewetting in a molecular beam epitaxy reactor with an ex situ Ge condensation process. With an in situ two-step process (annealing and Ge deposition) we produce two families of islands on the same sample: Si-rich, formed during the first step and, all around them, Ge-rich formed after Ge deposition. By increasing the amount of Ge deposited on the annealed samples from 0 to 18 monolayers, the islands' shape in the Si-rich zones can be tuned from elongated and flat to more symmetric and with a larger vertical aspect ratio.