Miniaturized acceleration sensors with in-plane polarized piezoelectric thin films produced by micromachining.

Miniaturized acceleration sensors employing piezoelectric thin films were fabricated through batch micromachining with silicon and silicon-on-insulator (SOI) wafers. The acceleration sensors comprised multiple suspension beams supporting a central seismic mass. Ferroelectric (Pb,La)(Zr,Ti) O(3) (PLZT) thin films were coated and in-plane polarized on the surfaces of the suspension beams for realizing electromechanical conversion through the piezoelectric effect.