Integrated multimode optical waveguides in glass using laser induced deep etching.

Glass is an ideal material for optical applications, even though only a few micromachining technologies for material ablation are available. These microstructuring methods are limited regarding precision and freedom of design. A micromachining process for glass is laser induced deep etching (LIDE).

Experimental Investigation of the Rapid Fabrication of Micron and Submicron Structures on Polymers Utilizing Ultrasonic Assisted Embossing.

Small-scale optical components with micron or submicron features have grown in popularity in recent years. High-quality, high-efficient, and cost-effective processing approaches for polymer optics mass production are an urgent need. In this study, ultrasonic vibration will be introduced in embossing.

Towards a Highly Sensitive Piezoelectric Nano-Mass Detection-A Model-Based Concept Study.

The detection of exceedingly small masses still presents a large challenge, and even though very high sensitivities have been archived, the fabrication of those setups is still difficult. In this paper, a novel approach for a co-resonant mass detector is theoretically presented, where simple fabrication is addressed in this early concept phase. To simplify the setup, longitudinal and bending vibrations were combined for the first time.

Development, Characterisation and High-Temperature Suitability of Thin-Film Strain Gauges Directly Deposited with a New Sputter Coating System.

New sensor and sensor manufacturing technologies are identified as a key factor for a successful digitalisation and are therefore economically important for manufacturers and industry. To address various requirements, a new sputter coating system has been invented at the Institute of Micro Production Technology. It enables the deposition of sensor systems directly onto technical surfaces.

Feasibility of Round Window Stimulation by a Novel Electromagnetic Microactuator.

Introduction: Most implantable hearing aids currently available were developed to compensate the sensorineural hearing loss by driving middle ear structures (e.g., the ossicles).

Longitudinal conductivity of LaF/SrF multilayer heterostructures.

LaF/SrF multilayer heterostructures with thicknesses of individual layers in the range 5-100 nm have been grown on MgO(100) substrates using molecular beam epitaxy. The longitudinal conductivity of the films has been measured using impedance spectroscopy in the frequency range 10-10 Hz and a temperature range 300-570 K. The ionic DC conductivities have been determined from Nyquist impedance diagrams and activation energies from the Arrhenius-Frenkel equation.

Recent Developments of Magnetoresistive Sensors for Industrial Applications.

The research and development in the field of magnetoresistive sensors has played an important role in the last few decades. Here, the authors give an introduction to the fundamentals of the anisotropic magnetoresistive (AMR) and the giant magnetoresistive (GMR) effect as well as an overview of various types of sensors in industrial applications. In addition, the authors present their recent work in this field, ranging from sensor systems fabricated on traditional substrate materials like silicon (Si), over new fabrication techniques for magnetoresistive sensors on flexible substrates for special applications, e.