Bioinspired In-Sensor Multimodal Fusion for Enhanced Spatial and Spatiotemporal Association.

Multimodal perception can capture more precise and comprehensive information compared with unimodal approaches. However, current sensory systems typically merge multimodal signals at computing terminals following parallel processing and transmission, which results in the potential loss of spatial association information and requires time stamps to maintain temporal coherence for time-series data. Here we demonstrate bioinspired in-sensor multimodal fusion, which effectively enhances comprehensive perception and reduces the level of data transfer between sensory terminal and computation units.

Ultraflexible Monolithic Three-Dimensional Static Random Access Memory.

Flexible static random access memory (SRAM) plays an important role in flexible electronics and systems. However, achieving SRAM with a small footprint, high flexibility, and high thermal stability has always been a big challenge. In this work, an ultraflexible six-transistor SRAM with high integration density is realized based on a monolithic three-dimensional (M3D) design.

Ultra-thin gate insulator of atomic-layer-deposited AlOand HfOfor amorphous InGaZnO thin-film transistors.

To strengthen the downscaling potential of top-gate amorphous oxide semiconductor (AOS) thin-film transistors (TFTs), the ultra-thin gate insulator (GI) was comparatively implemented using the atomic-layer-deposited (ALD) AlOand HfO. Both kinds of high-GIs exhibit good insulating properties even with the physical thickness thinning to 4 nm. Compared to the amorphous indium-gallium-zinc oxide (a-IGZO) TFTs with 4 nm AlOGI, the 4 nm HfOenables a larger GI capacitance, while the HfO-gated TFT suffers higher gate leakage current and poorer subthreshold slope, respectively originating from the inherently small band offset and the highly defective interface between a-IGZO and HfO.

Intercoupling of Cascaded Metasurfaces for Broadband Spectral Scalability.

Electromagnetic metasurfaces have been intensively used as ultra-compact and easy-to-integrate platforms for versatile wave manipulations from optical to terahertz (THz) and millimeter wave (MMW) ranges. In this paper, the less investigated effects of the interlayer coupling of multiple metasurfaces cascaded in parallel are intensively exploited and leveraged for scalable broadband spectral regulations. The hybridized resonant modes of cascaded metasurfaces with interlayer couplings are well interpreted and simply modeled by the transmission line lumped equivalent circuits, which are used in return to guide the design of the tunable spectral response.

Near-Ideal Top-Gate Controllability of InGaZnO Thin-Film Transistors by Suppressing Interface Defects with an Ultrathin Atomic Layer Deposited Gate Insulator.

An ultrathin atomic-layer-deposited (ALD) AlO gate insulator (GI) was implemented for self-aligned top-gate (SATG) amorphous InGaZnO (a-IGZO) thin-film transistors (TFTs). Although the 4.0-nm thick AlO exhibited ideal insulating properties, the interaction between ALD AlO and predeposited a-IGZO caused a relatively defective interface, thus giving rise to hysteresis and bias stress instabilities.

Transferred metal gate to 2D semiconductors for sub-1 V operation and near ideal subthreshold slope.

Ultrathin two-dimensional (2D) semiconductors are regarded as a potential channel material for low-power transistors with small subthreshold swing and low leakage current. However, their dangling bond–free surface makes it extremely difficult to deposit gate dielectrics with high-quality interface in metal-oxide-semiconductor (MOS) field-effect transistors (FETs). Here, we demonstrate a low-temperature process to transfer metal gate to 2D MoS for high-quality interface.

Low-temperature grown vertically aligned carbon nanotube array for an optimal infrared bolometer.

Vertically aligned carbon nanotube (VACNT) arrays have been explored as an absorber of thermal-type photodetectors. A long and dense VACNT array absorbs a wide spectral range of incident light with high absorption rate, but has a high thermal mass that results in a low response speed. To achieve a small thermal mass, a shorter and less dense VACNT array is needed.

Hybrid memristor-CMOS neurons for in-situ learning in fully hardware memristive spiking neural networks.

Spiking neural network, inspired by the human brain, consisting of spiking neurons and plastic synapses, is a promising solution for highly efficient data processing in neuromorphic computing. Recently, memristor-based neurons and synapses are becoming intriguing candidates to build spiking neural networks in hardware, owing to the close resemblance between their device dynamics and the biological counterparts. However, the functionalities of memristor-based neurons are currently very limited, and a hardware demonstration of fully memristor-based spiking neural networks supporting in-situ learning is very challenging.

Synthesis of Vertical Carbon Nanotube Interconnect Structures Using CMOS-Compatible Catalysts.

Synthesis of the vertically aligned carbon nanotubes (CNTs) using complementary metal-oxide-semiconductor (CMOS)-compatible methods is essential to integrate the CNT contact and interconnect to nanoscale devices and ultra-dense integrated nanoelectronics. However, the synthesis of high-density CNT array at low-temperature remains a challenging task. The advances in the low-temperature synthesis of high-density vertical CNT structures using CMOS-compatible methods are reviewed.

Sensing-range-tunable pressure sensors realized by self-patterned-spacer design and vertical CNT arrays embedded in PDMS.

A pressure sensor design suitable for a broad sensing range with high sensitivity and good stability is highly desirable for the detection of various pressures and meeting the requirements of different applications. Herein, we report sensing-range-tunable piezoresistive pressure sensors realized by self-patterned-spacer design. In the sensors, the two CNT-array layers embedded in PDMS are separated by the proposed self-patterned spacer.

Bistable active spectral tuning of one-dimensional nanophotonic crystal by phase change.

Active spectral tuning of nanophotonic devices offers many fascinating prospects for the realization of novel optical function. Here, switchable spectral response is enabled by the architecture of one-dimensional (1D) photonic crystal (PC) integrated with phase change material of the germanium antimony telluride (GST). Active and precise tuning of the bistable passband and central resonant frequency is demonstrated in the 1D PC composed of alternate SiN and GST nanofilms.

Low Temperature Synthesis of High-Density Carbon Nanotubes on Insulating Substrate.

A method to synthesize high-density, vertically-aligned, multi-wall carbon nanotubes (MWCNTs) on an insulating substrate at low temperature using a complementary metal⁻oxide⁻semiconductor (CMOS) compatible process is presented. Two factors are identified to be important in the carbon nanotube (CNT) growth, which are the catalyst design and the substrate material. By using a Ni⁻Al⁻Ni multilayer catalyst film and a ZrO₂ substrate, vertically-aligned CNTs can be synthesized at 340 °C using plasma-enhanced chemical vapor deposition (PECVD).

Synthesis and interface characterization of CNTs on graphene.

Carbon nanotubes (CNTs) and graphene are potential candidates for future interconnect materials. CNTs are promising on-chip via interconnect materials due to their readily formed vertical structures, their current-carrying capacity, which is much larger than existing on-chip interconnect materials such as copper and tungsten, and their demonstrated ability to grow in patterned vias with sub-50 nm widths; meanwhile, graphene is suitable for horizontal interconnects. However, they both present the challenge of having high-resistance contacts with other conductors.

A 200-Channel Area-Power-Efficient Chemical and Electrical Dual-Mode Acquisition IC for the Study of Neurodegenerative Diseases.

Microelectrode array (MEA) can be used in the study of neurodegenerative diseases by monitoring the chemical neurotransmitter release and the electrical potential simultaneously at the cellular level. Currently, the MEA technology is migrating to more electrodes and higher electrode density, which raises power and area constraints on the design of acquisition IC. In this paper, we report the design of a 200-channel dual-mode acquisition IC with highly efficient usage of power and area.

Low voltage and high ON/OFF ratio field-effect transistors based on CVD MoS2 and ultra high-k gate dielectric PZT.

MoS2 and other atomic-level thick layered materials have been shown to have a high potential for outperforming Si transistors at the scaling limit. In this work, we demonstrate a MoS2 transistor with a low voltage and high ON/OFF ratio. A record small equivalent oxide thickness of ∼1.

Highly aligned graphene/polymer nanocomposites with excellent dielectric properties for high-performance electromagnetic interference shielding.

Nanocomposites that contain reinforcements with preferred orientation have attracted significant attention because of their promising applications in a wide range of multifunctional fields. Many efforts have recently been focused on developing facile methods for preparing aligned graphene sheets in solvents and polymers because of their fascinating properties including liquid crystallinity and highly anisotropic characteristics. Self-aligned in situ reduced graphene oxide (rGO)/polymer nanocomposites are prepared using an all aqueous casting method.

Modeling of the cell-electrode interface noise for microelectrode arrays.

Microelectrodes are widely used in the physiological recording of cell field potentials. As microelectrode signals are generally in the μV range, characteristics of the cell-electrode interface are important to the recording accuracy. Although the impedance of the microelectrode-solution interface has been well studied and modeled in the past, no effective model has been experimentally verified to estimate the noise of the cell-electrode interface.

Cross-section control of stacked nanowires formed by Bosch process and oxidation.

The cross-sectional shape of the stacked silicon nanowires (SiNWs) formed by the Bosch process and stress-limited oxidation is studied in this paper. Under the condition of high temperature oxidation, the resulting nanowires highly resemble the initial shapes resulting by the Bosch process. The effects of etching and passivation in the Bosch process are modeled to provide a guideline to control the cross-section of the stacked nanowires.

A unified drain current model for nanoscale double-gate and surrounding-gate MOSFETs incorporating velocity saturation.

A unified drain current model for undoped or lightly doped symmetric double-gate and surrounding-gate MOSFETs incorporating velocity saturation effect is proposed in this paper. The unified charge-based core model for undoped or lightly doped double-gate and surrounding-gate MOSFETs is presented first based on the previously published separate models. Caughey-Thomas engineering mobility model with its exponent factor n = 2 is then integrated self-consistently into the unified drain current model development of the two device structures.

The use of SU-8 topographically guided microelectrode array in measuring extracellular field potential propagation.

The microelectrode array (MEA) can be used to study extracellular field potentials (exFPs) of electrogenic cells. Microcontact printing, which must be repeated after each experiment, is often used to promote accurate positioning of cells onto electrodes. The present study used MEAs with evenly spaced detection electrodes aligning along permanent SU-8 topographical guidance channels to measure propagation direction and speed.

A study of the relationship between pharmacologic preconditioning and adenosine triphosphate-sensitive potassium (KATP) channels on cultured cardiomyocytes using the microelectrode array.

The microelectrode array was used to study the pharmacologic preconditioning effect of adenosine triphosphate-sensitive channel activation using potassium channel openers (KCOs) on rat cardiomyocytes over 90 minutes of ischemia. Cell viability and electrophysiological changes between KCOs pretreated and untreated cardiomyocytes were compared. Ischemia caused significant increases in beat frequency, extracellular field potential amplitude, and propagation velocity of spontaneously beating untreated cardiomyocytes.

Modulatory action of potassium channel openers on field potential and histamine release from rat peritoneal mast cells.

To determine whether changes in membrane potential affect the extent of mast cell degranulation, compound 48/80 was added to rat peritoneal mast cell suspensions in the absence or presence of potassium channel openers (KCOs). Changes were compared between the field potential (FP) and the amount of histamine released. The results demonstrated that (i) the onset and duration of FP, which reflects the hyperpolarizing nature of the response, increased as the concentration of compound 48/80 increased; (ii) both FP and the amount of histamine released increased as the concentration of compound 48/80 increased; (iii) although both KCOs (SDZ PCO400, a benzopyran derivative, and P1060, a cyanoguanidine derivative) potentiated compound 48/80-induced increases in FP and histamine release, without compound 48/80, they had no effect on either parameter; (iv) both glibenclamide and charybdotoxin significantly attenuated the compound 48/80-induced increase in FP; and (v) glibenclamide was able to attenuate the KCO-induced potentiation of FP.

To establish a pharmacological experimental platform for the study of cardiac hypoxia using the microelectrode array.

Introduction: Simultaneous recording of electrical potentials from multiple cells may be useful for physiological and pharmacological research. The present study aimed to establish an in vitro cardiac hypoxia experimental platform on the microelectrode array (MEA).

Methods: Embryonic rat cardiac myocytes were cultured on the MEAs.

The use of microelectrode array (MEA) to study rat peritoneal mast cell activation.

We performed this study to demonstrate the applicability of the microelectrode array (MEA) to study electrophysiological changes of rat peritoneal mast cells in the presence of compound 48/80 under normal, Ca(2+)-free, Ca(2+)-free with EDTA, and Cl(-)-free conditions. The use of high extracellular K(+) (KCl, 150 mM), charybdotoxin (ChTX, 100 nM), and Cl(-)-free containing ChTX buffers verified that the hyperpolarizing signal was due to the activation of mainly K(+) and, to a lesser extent, Cl(-) channels. Compound 48/80 concentration-dependently shortened the latent periods (the onset of response) and increased both the spatial (the K(+) and Cl(-) hyperpolarizing field potentials, HFP) and temporal measurements (the duration of response).