A Method of Precise Auto-Calibration in a Micro-Electro-Mechanical System Accelerometer.

A novel design of a MEMS (Micro-Electromechanical System) capacitive accelerometer fabricated by surface micromachining, with a structure enabling precise auto-calibration during operation, is presented. Precise auto-calibration was introduced to ensure more accurate acceleration measurements compared to standard designs. The standard mechanical structure of the accelerometer (seismic mass integrated with elastic suspension and movable plates coupled with fixed plates forming a system of differential sensing capacitors) was equipped with three movable detection electrodes coupled with three fixed electrodes, thus creating three atypical tunneling displacement transducers detecting three specific positions of seismic mass with high precision, enabling the auto-calibration of the accelerometer while it was being operated.

Electric-Contact Tilt Sensors: A Review.

A review of various kinds of solid tilts sensors, using a free mechanical member for generation of electric-contact (mostly a ball), is presented. Standard and original solutions are discussed. The latest patents are described.