The article presents the very first materials to the ultralow temperature cofired ceramic (ULTCC) technology with the sintering temperature of 400 °C. The dielectric composites are based on a rutile and anatase with commercial GO17 sealing glass. In addition to the bulk samples, the tape casting procedure is also introduced to show its feasibility to cofiring with commercial Ag electrodes at 400 °C.
View Article and Find Full Text PDFThis paper presents for the first time the fabrication of dielectric ceramic parts by 3D printing without sintering. The printable paste was prepared by mixing a carefully selected amount of water-soluble LiMoO powder with water. A viscous mixture of solid ceramic particles and saturated aqueous phase was formed with a solid content of 60.
View Article and Find Full Text PDFA complementary metal-oxide-semiconductor (CMOS) chip biosensor was developed for cell viability monitoring based on an array of capacitance sensors utilizing a ring oscillator. The chip was packaged in a low temperature co-fired ceramic (LTCC) module with a flip chip bonding technique. A microcontroller operates the chip, while the whole measurement system was controlled by PC.
View Article and Find Full Text PDFACS Appl Mater Interfaces
April 2018
This paper reports the first ultralow sintering temperature (450 °C) cofired multifunctional ceramic substrate based on a commercial lead zirconium titanate (PZ29)-glass composite, which is fabricated by tape casting, isostatic lamination, and sintering. This substrate was prepared from a novel tape casting slurry composition suitable for cofiring at low temperatures with commercial Ag electrodes at 450 °C. The green cast tape and sintered substrate showed a surface roughness of 146 and 355 nm, respectively, suitable for device-level fabrication by postprocessing.
View Article and Find Full Text PDFCell viability monitoring is an important part of biosafety evaluation for the detection of toxic effects on cells caused by nanomaterials, preferably by label-free, noninvasive, fast, and cost effective methods. These requirements can be met by monitoring cell viability with a capacitance-sensing integrated circuit (IC) microchip. The capacitance provides a measurement of the surface attachment of adherent cells as an indication of their health status.
View Article and Find Full Text PDFIEEE Trans Ultrason Ferroelectr Freq Control
September 2012
Low-temperature cofired ceramic (LTCC) has proven to be a cost-effective, flexible technology for producing complicated structures such as sensors, actuators, and microsystems. This paper presents a piezoelectric active mirror suspension system embedded into LTCC. In the structure, the LTCC was used as a package, for the passive layers of piezoelectric monomorphs, as support for the mirrors, and as a substrate for the conductors.
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