Hall sensors for extreme temperatures.

We report on the preparation of the first complete extreme temperature Hall sensor. This means that the extreme-temperature magnetic sensitive semiconductor structure is built-in an extreme-temperature package especially designed for that purpose. The working temperature range of the sensor extends from -270 °C to +300 °C.

Investigation of nanoscratch processes in semiconductor materials for application to maskless patterning.

Features of nanoscratching processes with a diamond 90 degrees cube corner tip in semiconductor materials have been studied with different tip orientations and scratch procedures: constant and linearly increasing normal load during scratching, multi-scratching and the direct analysis of the generated scratch by re-scanning the scratch with a strongly reduced normal load. These scratch functions allowed a detailed investigation of the materials response due to the mechanical deformation process. Elastic material recovery, plastic deformation and material removal contribute to the generation of scratch groove profiles.