We use atomically resolved scanning transmission electron microscopy and electron energy loss spectroscopy to determine the atomic-scale structural, chemical and electronic properties of artificial engineered defects in irradiated-annealed high temperature superconducting wires based on epitaxial Y(Dy)BCO film. We directly probe the oxygen vacancy defects in both plane and chain sites after irradiation with 18-meV Au ions. The plane site vacancies are reoccupied during post-annealing treatment.
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