A quartz crystal microbalance (QCM)-based easy setup device for real-time mass change detection under high-power RF plasma.

Sensing technologies serve a crucial role in monitoring and testing surface properties in biosensors, thin films, and many other industries. Plasma treatments are routinely used in most of these technologies to modify the surfaces of materials. However, due to the high radio frequency (RF) noise in plasma processes, real-time surface tracking is still rather difficult.