In the paper, new detection methods that can be used to detect signals in a miniature MEMS (Micro-Electro-Mechanical System) electron microscope were presented. The methods were designed to fit the structure of the developed MEMS microscope, equipped with an electron-optical microcolumn and a scanning system based on an octupole deflector. In the experiments carried out, imaging was performed using a system of three silicon detectors placed above, below, and at the sample level and integrated with the octupole deflection system.
View Article and Find Full Text PDFThis article presents a field-emission electron gun intended for use in a MEMS (microelectromechanical system) electron microscope. Its fabrication process follows the technology of a miniature device under development built from silicon electrodes and glass spacers. The electron gun contains a silicon cathode with a single very sharp protrusion and a bundle of disordered CNTs deposited on its end (called a sharp silicon/CNT cathode).
View Article and Find Full Text PDFThis article describes a miniature electron beam scanning system based on an octupole electrode as the key stage of the implementation of the MEMS electron microscope. The scanning system consists of a silicon electrode with a central hole, containing 8 properly powered elements and a special electronic system controlling voltage. Octupole electrode was made using MEMS technology.
View Article and Find Full Text PDFThe paper considers some major problems of adapting the multi-detector method for three-dimensional (3D) imaging of wet bio-medical samples in Variable Pressure/Environmental Scanning Electron Microscope (VP/ESEM). The described method pertains to "single-view techniques", which to create the 3D surface model utilise a sequence of 2D SEM images captured from a single view point (along the electron beam axis) but illuminated from four directions. The basis of the method and requirements resulting from them are given for the detector systems of secondary (SE) and backscattered electrons (BSE), as well as designs of the systems which could work in variable conditions.
View Article and Find Full Text PDFTwo concepts of the secondary electron detection inside the intermediate chamber of the variable pressure scanning electron microscopy have been discussed. One of them, the two-stage secondary electron detector has been the subject of previous publications. The other one, the intermediate secondary electron detector is an improved solution in respect of its complexity, vacuum demands and dimensions.
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