Diffractive order Mueller matrix ellipsometry for the design and manufacture of polarization beam splitting metasurfaces.

Optical metasurface technology promises an important potential for replacing bulky traditional optical components, in addition to enabling new compact and lightweight metasurface-based devices. Since even subtle imperfections in metasurface design or manufacture strongly affect their performance, there is an urgent need to develop proper and accurate protocols for their characterization, allowing for efficient control of the fabrication. We present non-destructive spectroscopic Mueller matrix ellipsometry in an uncommon off-specular configuration as a powerful tool for the characterization of orthogonal polarization beam-splitters based on a-Si:H nanopillars.

Dispersion of resonant modes in patch antenna lattices.

Spectroscopic polar angle resolved Mueller matrix ellipsometry at multiple azimuthal incidences, together with a full-field model, reveal new details in the interplay between localized gap surface plasmon resonances and propagating surface plasmon polaritons (SPPs) in a rectangular array of metal-insulator-metal patches. A plane-wave expansion of the field in the insulator shows that the fundamental localized resonances are composed of oppositely propagating modes. Sharp dispersive resonances observed in p-polarization, excited near the opening of diffracted orders, are shown to be grating coupled SPPs.

Effects of optical activity to Mueller matrix ellipsometry of composed waveplates.

Mueller matrix ellipsometry has been used to precisely characterize quartz waveplates for demanding applications in the semiconductor industry and high precision polarimetry. We have found this experimental technique to be beneficial to use because it enables us to obtain absolute and precise measurement of retardation in a wide spectral range, waveplate orientation, and compound waveplate adjustment. In this paper, the necessity of including the optical activity in the Mueller matrix model and data treatment is demonstrated.

Critical dimension metrology of a plasmonic photonic crystal based on Mueller matrix ellipsometry and the reduced Rayleigh equation.

A computationally efficient algorithm based on the reduced Rayleigh equation, combined with an optimization scheme, is used to accurately retrieve the morphological parameters of a two-dimensional plasmonic photonic crystal from angle-resolved spectroscopic Mueller matrix ellipsometric measurements. The numerical method is successfully tested against experimental data and gives morphological parameters consistent with SEM and AFM measurements.

Dispersion of polarization coupling, localized and collective plasmon modes in a metallic photonic crystal mapped by Mueller Matrix Ellipsometry.

We report a spectroscopic Mueller matrix experimental study of a plasmonic photonic crystal consisting of gold hemispheroidal particles (lateral radius 54 nm, height 25 nm) arranged on a square lattice (lattice constant 210 nm) and supported by a glass substrate. Strong polarization coupling is observed for ultraviolet wavelengths and around the surface plasmon resonance for which the off-block-diagonal Mueller matrix elements show pronounced anisotropies. Due to the Rayleigh anomalies, the block-diagonal Mueller matrix elements produce a direct image of the Brillouin Zone (BZ) boundaries of the lattice and resonances are observed at the M-point in the first and at the X-point in the second BZ.