E-PVT: enhanced position-velocity-time scheduler for computer-controlled optical finishing with comprehensive considerations of dynamics constraints, continuity and efficiency.

Deterministic computer-controlled optical finishing is an essential approach for achieving high-quality optical surfaces. Its determinism and convergence rely heavily on precise and smooth motion control to guide the machine tool over an optical surface to correct residual errors. One widely supported and smooth motion control model is position-velocity-time (PVT), which employs piecewise cubic polynomials to describe positions.

Two-step retrace error calibration removing tilt ambiguity in coherence scanning interferometry.

In interferometry measurement, the retrace error often limits its high-precision metrology applications. Retrace error calibration with tilted flats can give a relation between the retrace error and the introduced tilt angles, but there is still an ambiguity between the introduced tilt angles and the tilt terms in the created retrace error. We propose a novel, to the best of our knowledge, two-step calibration method to resolve this tilt ambiguity.

Nanometer flat blazed x-ray gratings using ion beam figure correction.

With the development of nanometer accuracy stitching interferometry, ion beam figuring (IBF) of x-ray mirrors can now be achieved with unprecedented performance. However, the process of producing x-ray diffraction gratings on these surfaces may degrade the figure quality due to process errors introduced during the ruling of the grating grooves. To address this challenge, we have investigated the post-production correction of gratings using IBF, where stitching interferometry is used to provide in-process feedback.