Microfluidic Reactor Array Device for Massively Parallel In-situ Synthesis of Oligonucleotides.

We have designed and fabricated a microfluidic reactor array device for massively parallel in-situ synthesis of oligonucleotides (oDNA). The device is made of glass anodically bonded to silicon consisting of three level features: microreactors, microchannels and through inlet/outlet holes. Main challenges in the design of this device include preventing diffusion of photogenerated reagents upon activation and achieving uniform reagent flow through thousands of parallel reactors.

Microassembly techniques for a three-dimensional neural stimulating microelectrode array.

This paper describes microassembly techniques for an out-of-plane three-dimensional microelectrode array for neural stimulating and recording in the central nervous system. An interlocking mechanism has been introduced into the microassembly components to facilitate the process, increase the robustness of the assembled device and improve the yield of the overall system. In-vivo testing has demonstrated full functionality of the microassembled 3D array.

A parylene-silicon cochlear electrode array with integrated position sensors.

A thin-film cochlear electrode array has been developed for a cochlear prosthesis to achieve improved sound perception and position accuracy. The array is fabricated using a bulk-silicon micromachining process that allows parylene deposition and patterning at wafer level, followed by a wet silicon release etch that is compatible with the use of boron etch-stops. The process is capable of realizing arrays with substrates stressed to hug the modiolar wall in the rest state and whose stiffness can be adjusted over a wide range.

A low-profile three-dimensional silicon/parylene stimulating electrode array for neural prosthesis applications.

This paper describes a low-profile three-dimensional silicon/parylene microelectrode array as basis for practical neural prostheses for use in the central nervous system. The circuit areas of the silicon probes, containing mixed-signal CMOS circuitry for neural stimulation/recording, can be folded over to reduce the overall height of the microassembled array above the cortical surface. The low- profile structure is implemented using multiple gold beams spaced by orthogonal silicon braces.

A low-profile three-dimensional neural stimulating array with on-chip current generation.

This paper describes a low-profile silicon microelectrode array for selectively stimulating in the central nervous system. The array consists of a number of 64-site 8-channel planar CMOS probes, a platform to support the probes on the cortical surface, spacers to hold the probes orthogonal to the platform, and a hybrid chip for platform address decoding. It features integrated circuitry with on-chip current generation to deliver biphasic currents from -127 microA to +127 microA to selected sites with 1 microA resolution and fold-down structures to reduce the vertical rise above the cortex for chronic implants.