A micro opto-mechanical displacement sensor based on micro-diffraction gratings: design and characterization.

A micro opto-mechanical displacement sensor is here presented. It is constituted by a sensing element based on two overlapped micro-diffraction gratings (MDGs). They present a platinum layer (45 nm of thick) on a glass substrate, a period of 525 µm constituted by a width of 150 µm of platinum separated (71.