Thin film piezoelectrics for bulk acoustic wave (BAW) acoustophoresis.

Acoustophoresis, the movement of particles with sound, has evolved as a promising handling tool for micrometer-sized particles. Recent developments in thin film deposition technologies have enabled the reproducible fabrication of thin film piezoelectric materials for miniaturized ultrasound transducers. In this study, we combine both technologies and present the first implementation of a thin film Pb(Zr,Ti)O (PZT) transducer as actuation source for bulk acoustic wave (BAW) acoustophoresis.