Publications by authors named "Luis V Rodriguez de Marcos"

A new procedure to measure the extinction coefficient k of film materials that are relatively transparent is presented. This procedure does not require the use of an optical-constant model or the knowledge of extra physical properties of the material, such as the specific heat capacity. It involves preparing a sample with two areas, at least one of them coated with the film, whereas the other may remain uncoated or may be coated with a different thickness of the same material.

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Imaging at H Ly-α (121.6 nm), among other spectral lines in the short far UV (FUV), is of high interest for astrophysics, solar, and atmosphere physics, since this spectral line is ubiquitously present in space observations. However, the lack of efficient narrowband coatings has mostly prevented such observations.

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Adachi proposed a procedure to avoid divergences in optical-constant models by slightly shifting photon energies to complex numbers on the real part of the complex dielectric function, ε1. The imaginary part, ε2, was ignored in that shift and, despite this, the shifted function would also provide ε2 (in addition to ε1) in the limit of real energies. The procedure has been successful to model many materials and material groups, even though it has been applied phenomenologically, i.

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Article Synopsis
  • Thick absorber layers in EUV photomasks negatively affect pattern quality in photolithography, necessitating the development of new materials with improved absorption.
  • This study focuses on the optical properties of Tellurium (Te) and Tellurium Oxide (TeO) films in the 13-14 nm range, exploring their effectiveness as potential replacements for current absorbers, TaN and TaBN.
  • The results indicate that Te and TeO can achieve significantly lower reflectivity at 13.5 nm, with Te showing a reflectivity of about 0.7% at a thickness of 32.4 nm, outperforming traditional materials.
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Causality implies that the optical constants of any material continue in the upper complex plane of photon energies or wavelengths as an analytic function. This is the basis for Kramers-Kronig dispersion relations to obtain ɛ from ɛ, or n from k. However, there have not been attempts to explore this continuation.

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Optical-constant data of a material typically come from various sources, which may result in inconsistent data. Sum rules are tests to evaluate the self-consistency of optical constant data sets. Standard sum rules provide collective self-consistency evaluation of an optical-constant set in the full electromagnetic spectrum, but they give no information on the specific spectral range originating the inconsistency.

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Novel narrowband multilayer coatings efficient at a wavelength as short as 100 mn are presented, which pushes shortwards the existing limit of reported narrowband multilayers. Such limit had been established at ~120 nm, close to the MgF cutoff wavelength. The new multilayers combine layers of Al, LiF, and SiC, in an Al/LiF/SiC/LiF multilayer design (four layers, starting with the innermost layer).

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Progress towards far UV (FUV) coatings with enhanced reflectance is invaluable for future space missions, such as LUVOIR. This research starts with the procedure developed to enhance MgF-protected Al reflectance through depositing MgF on a heated aluminized substrate [Quijada et al., Proc.

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Tauc-Lorentz model is commonly used to describe the dielectric constant of amorphous semiconductors as a function of few parameters. However, this model is not fully analytic and presents other mathematical shortcomings. A modified self-consistent model based on the integration of [E'-(E + ia)]-1 functions using Tauc-Lorentz`s ε2 expression as a weight function is presented.

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