Conformal nanocoating of zirconia nanoparticles by atomic layer deposition in a fluidized bed reactor.

Primary zirconia nanoparticles were conformally coated with alumina ultrathin films using atomic layer deposition (ALD) in a fluidized bed reactor. Alternating doses of trimethylaluminium and water vapour were performed to deposit Al(2)O(3) nanolayers on the surface of 26 nm zirconia nanoparticles. Transmission Fourier transform infrared spectroscopy was performed ex situ.