Influence of Geometric Properties of Capacitive Sensors on Slope Error and Nonlinearity of Displacement Measurements.

Capacitive sensors are widely used in industrial applications, such as CNC machine tools, where reliable positioning in the micrometer range with nanometer accuracy is required. Hence, these sensors are operated in harsh industrial environments. The accuracy of these sensors is mainly limited by slope errors and nonlinearities.

Correlation and convolution filtering and image processing for pitch evaluation of 2D micro- and nano-scale gratings and lattices.

We have mathematically explicated and experimentally demonstrated how a correlation and convolution filter can dramatically suppress the noise that coexists with the scanned topographic signals of two-dimensional (2D) gratings and lattices with 2D perspectives. To realize pitch evaluation, the true peaks' coordinates have been precisely acquired after detecting the local maxima from the filtered signal, followed by image processing. The combination of 2D filtering, local-maxima detecting, and image processing make up the pitch detection (PD) method.

The European nanometrology landscape.

This review paper summarizes the European nanometrology landscape from a technical perspective. Dimensional and chemical nanometrology are discussed first as they underpin many of the developments in other areas of nanometrology. Applications for the measurement of thin film parameters are followed by two of the most widely relevant families of functional properties: measurement of mechanical and electrical properties at the nanoscale.