Micromachining of bulk glass with bursts of femtosecond laser pulses at variable repetition rates.

Oscillator-only femtosecond laser micromachining enables the manufacturing of integrated optical components with circular transverse profiles in transparent materials. The circular profile is due to diffusion of heat accumulating at the focus. We control the heat diffusion by focusing bursts of femtosecond laser pulses at various repetition rates into sodalime glass.