Research on a New Method of Macro-Micro Platform Linkage Processing for Large-Format Laser Precision Machining.

In recent years, the macro-micro structure (servo platform for macro motion and galvanometer for micro motion) composed of a galvanometer and servo platform has been gradually applied to laser processing in order to address the increasing demand for high-speed, high-precision, and large-format precision machining. The research in this field has evolved from step-and-scan methods to linkage processing methods. Nevertheless, the existing linkage processing methods cannot make full use of the field-of-view (FOV) of the galvanometer.