Development of a Microheater with a Large Heating Area and Low Thermal Stress in the Heating Area.

In this paper, a microheater that can absorb thermal stress and has a large heating area is demonstrated by optimizing the structure and process of the microheater. Four symmetrically distributed elongated support beam structures were machined around the microheater via deep silicon etching. This design efficiently mitigates the deformation of the heated region caused by thermal expansion and enhances the structural stability of the microheater.

Design and Analysis of XY Large Travel Micro Stage Based on Secondary Symmetric Lever Amplification.

This study presents a newly developed piezoelectric drive mechanism for the purpose of designing, analyzing, and testing a micro-positioning platform driven by piezoelectric actuators. The platform incorporates a piezoelectric ceramic actuator and a flexible hinge drive and features a symmetrical two-stage lever (STSL) amplification mechanism and a parallelogram output structure. The implementation of this design has led to notable enhancements in the dynamic properties of the platform, thereby eliminating the undesired parasitic displacement of the mechanism.