Wrinkled Thermo-Electric Meander-Shaped Element on a Thin Freestanding PDMS Membrane.

Natural wrinkling of metal films on silicone substrates can appear by means of the metal sputtering process and can be described by the continuous elastic theory and non-linear wrinkling model. Here, we report the fabrication technology and behavior of thin freestanding Polydimethylsiloxane (PDMS) membranes equipped with thermo-electric meander-shaped elements. The Cr/Au wires were obtained on the silicone substrate by magnetron sputtering.