High-Performance Planar Thin-Film Thermoelectric Cooler Based on Sputtered Nanocrystalline BiTe/BiSbTe Thin Films for On-Chip Cooling.

The development of high-performance thin-film thermoelectric coolers (TFTECs) that are compatible with standard integrated circuit processes and can reduce power consumption is critical to achieving large-scale applications. In this work, we fabricate a planar TFTEC based on nanocrystalline p-type BiSbTe and n-type BiTe thin films using magnetron sputtering, standard lithography, and postannealing processes. The power factors of the BiSbTe and BiTe thin films reach 3.